Title:
MASS FLOW METER
Document Type and Number:
Japanese Patent JPH04220530
Kind Code:
A
Abstract:
PURPOSE:To prevent fluid from flowing in a sensor tube when a failure occurs in the sensor tube so as to prevent fluid leakage with respect to a mass flow meter. CONSTITUTION:A mass flow meter 10 comprises a manifold 13 between an inlet pipe 14 and an outlet pipe 15, while a pair of sensor tubes 11, 12 are connected to the manifold 13. The manifold 13 has a switch valve 26 between an inlet port 14a and a flow path 13c connected to the sensor tubes 11, 12, while a bypass tube 27 connected to the outlet tube 15 is connected to the switch valve 26. Normally the switch valve 26 connects between the inlet port 14a and the flow path 13c to make fluid from the inlet port 14a flow to the sensor tubes 11, 12. When a failure occurs in the sensor tubes 11,12, the switch valve 26 is switched to connect the inlet port 14a to the bypass tube 27.
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Inventors:
SHIBAZAKI MITSUO
Application Number:
JP40452290A
Publication Date:
August 11, 1992
Filing Date:
December 20, 1990
Export Citation:
Assignee:
TOKICO LTD
International Classes:
G01F1/84; (IPC1-7): G01F1/84
Attorney, Agent or Firm:
Tadahiko Ito (1 outside)