Title:
MASS FLOW METER
Document Type and Number:
Japanese Patent JPS52153474
Kind Code:
A
Abstract:
PURPOSE: Measurement of slight mass flow rates at high sensitivity is made possible by connecting the input and output ends of a fine tube in which fluid flows and a part of the midportions thereof to a common heat sink thereby forming two sets of electrically closed circuits.
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Inventors:
IKEDA KIYOUICHI
Application Number:
JP7018476A
Publication Date:
December 20, 1977
Filing Date:
June 15, 1976
Export Citation:
Assignee:
YOKOGAWA ELECTRIC WORKS LTD
International Classes:
G01F1/68; G01F1/684; G01F1/688; G01F1/69; G01F1/696; G01F1/76; G01F1/78; (IPC1-7): G01F1/68; G01F1/76
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