Title:
MASS MEASURING CHIP AND MASSES MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3876842
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a mass measuring chip capable of both heightening sensitivity and reducing costs.
SOLUTION: This chip has a sensor part 10 equipped with a piezoelectric vibrating reed 20, wherein sensor side connection electrodes 24a, 24b for connecting the piezoelectric vibrating reed 20 to an oscillation circuit element 41 are formed, and a base part 30 loaded with the oscillation circuit element 41, wherein base side connection electrodes 44a, 44b for connecting the oscillation circuit element 41 to the piezoelectric vibrating reed 20 are formed. The sensor side connection electrodes 24a, 24b are allowed to abut detachably on the base side connection electrodes 44a, 44b, and the piezoelectric vibrating reed 20 is electrically connected to the oscillation circuit element 41.
Inventors:
Seiichiro Ogura
Yoshihiro Kobayashi
Maeda Yoshio
Yoshihiro Kobayashi
Maeda Yoshio
Application Number:
JP2003057499A
Publication Date:
February 07, 2007
Filing Date:
March 04, 2003
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01G3/16; G01G19/00; G01N5/02; (IPC1-7): G01G3/16; G01G19/00; G01N5/02
Domestic Patent References:
JP2000338022A | ||||
JP11281561A | ||||
JP8075628A | ||||
JP2001251156A | ||||
JP63266338A | ||||
JP63241448A | ||||
JP2001320239A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Fujitsuna Hideyoshi
Osamu Suzawa
Fujitsuna Hideyoshi
Osamu Suzawa