Title:
Mass spectrograph variable outlet opening
Document Type and Number:
Japanese Patent JP6073867
Kind Code:
B2
Abstract:
A method and apparatus is provided for reducing unwanted isotopes of an ion implantation species from an ion beamline. The apparatus herein disclosed is a mass analysis variable exit aperture that selectively reduces the size of an exit aperture as seen by an ion beam. In one embodiment, the variable mass analysis exit aperture is located within a mass analyzer at a position upstream of a resolving aperture and effectively limits the size of an exit aperture so as to allow passage of desired implantation isotope(s) while blocking the passage of unwanted implantation isotopes. In one particular embodiment, the mass analysis variable exit aperture has a mechanical drive mechanism that enables a blocking structure to be moved into the path of an ion beam in a graduated fashion as guided by a control unit that operates based upon one or more characteristics of the ion beam.
Inventors:
Humvee, william
Valinski, Joseph
Valinski, Joseph
Application Number:
JP2014512830A
Publication Date:
February 01, 2017
Filing Date:
May 24, 2012
Export Citation:
Assignee:
AXCELIS TECHNOLOGIES, INC.
International Classes:
H01J37/317
Domestic Patent References:
| JP10512710A | ||||
| JP2008546155A | ||||
| JP6260133A | ||||
| JP2007273368A | ||||
| JP2008204944A | ||||
| JP2004508668A |
Foreign References:
| US20070187620 |
Attorney, Agent or Firm:
Harakenzo world patent & trademark
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