MASS SPECTROGRAPH

Japanese Patent JPH08222182

A

PURPOSE: To provide a mass spectrograph capable of invariably conducting the residual gas partial pressure analysis with a single structure via a simple action at the time of a high evacuation before and after vacuum processing and at the time of a low evacuation during vacuum processing.

CONSTITUTION: A chassis 1 connected to a vacuum processor 2 is divided into one chassis 1 connected to the vacuum processor 2 and the other relatively movable chassis 1' kept airtight with one chassis 1, and a gas guide pipe is provided on one chassis 1 connected to the vacuum processor 2. An ionization mechanism section and an analysis section are fixed to the other chassis 1', and the gas guide pipe is removably connected to the ionization mechanism section fixed to the other chassis 1' so that the flow of the ionized residual gas between the ionization mechanism section and the analysis section can be limited.

KISHIMOTO SATOSHI
YAJIMA AKIRA
NISHITANI EISUKE
SHIMAMURA HIDEAKI
KOBAYASHI HIDE
UCHIDA NORIHIRO

JP2262095A

August 30, 1996

February 10, 1995

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HITACHI LTD

G01N27/62; B01L1/00; C04B28/08; C23C14/00; C23C16/44; H01J49/26; H01L21/203; H01L21/302; H01L21/3065; (IPC1-7): H01J49/26; B01L1/00; G01N27/62; H01L21/203; H01L21/3065

Masami Akimoto

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