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Title:
MASS SPECTROMETER FOR FOCUS ION BEAM
Document Type and Number:
Japanese Patent JPH04351839
Kind Code:
A
Abstract:

PURPOSE: To facilitate setting of a small type and an electromagnetic field crossing type by burying a part of an electrode pair having an electrode width that surpasses an ion beam passing region width, in a similar magnetic pole pair, so as to reduce inter-magnetic pole gap and an inter-electrode gap.

CONSTITUTION: A magnetic pole 21 and a permanent magnet 22 for magnetizing the magnetic pole are formed in a window, and a vacuum duct 26 is arranged in the center. A part of an electrode 23 is buried in the magnetic pole 21. Electric resistance between each electrode is of MΩunit, and insulation is retained between each electrode 23. A gap is reduced to a large degree to the vacuum duct 26 which is a passing region of ion beam, without sacrificing cross sectional aperture ratio, and cross arrangement of the electrode 23 and the magnetic pole 21 is also carried out with good accuracy.


Inventors:
ISHIBASHI KIYOTAKA
INOUE KENICHI
KAWADA YUTAKA
Application Number:
JP1991000126039
Publication Date:
December 07, 1992
Filing Date:
May 29, 1991
Export Citation:
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Assignee:
KOBE STEEL LTD
International Classes:
H01J49/28; H01J37/05; H01J49/48; (IPC1-7): H01J49/28