Title:
マスフローコントローラ流量検定システム
Document Type and Number:
Japanese Patent JP3557087
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a mass flow controller flow rate detecting system in which the flow rate measuring efficiency of the mass flow controller can be improved. SOLUTION: This mass flow controller flow rate testing system is provided with a plurality of process gas lines 1A-1C for supplying process gas, and a measuring gas line 11 branch-connected with the process gas lines. A first pressure adjuster 14, measuring starting interrupting valve 15, pressure sensor 16, and second pressure adjuster 21 are sequentially piped at the common part of the measuring gas line 11, and connecting part interrupting valves 18A-18C are sequentially piped at each branch part 12A-12C of the measuring gas line 11. Pressure drop between the measuring starting interrupting valve 15 and the second pressure adjuster 21 is measured by the pressure sensor 16 so that the flow rate testing of mass flow controllers 2A-2C can be attained.
Inventors:
Shigeru Hayashimoto
Atsuyuki Sakai
Atsuyuki Sakai
Application Number:
JP2550898A
Publication Date:
August 25, 2004
Filing Date:
February 06, 1998
Export Citation:
Assignee:
CKD Corporation
International Classes:
F15C1/04; G01F25/00; G01F1/34; (IPC1-7): G01F1/34; G01F25/00
Domestic Patent References:
| JP7306084A | ||||
| JP7281760A | ||||
| JP6119059A |
Attorney, Agent or Firm:
Takashi Tomizawa
Ikuo Yamanaka
Akika Okado
Ikuo Yamanaka
Akika Okado