Title:
MASTER DISK FOR ELECTROFORMING, PRODUCTION METHOD OF MASTER DISK FOR ELECTROFORMING, AND PRODUCTION METHOD OF ELECTROFORMED OBJECT
Document Type and Number:
Japanese Patent JP2023044211
Kind Code:
A
Abstract:
To provide a master disk for electroforming, a production method of the master disk for electroforming, and a production method of an electroformed object using the master disk for electroforming, which have excellent adhesive properties to the electroformed object and can suppress the peeling of the electroformed object in growth.SOLUTION: A master disk for electroforming comprises a substrate including an n-type semiconductor, on a surface of which a pattern is laid and an oxide film is formed. A thickness of the oxide film is 18Å or smaller. The master disk for electroforming, a production method of the master disk for electroforming, and a production method of an electroformed object using the master disk for electroforming are provided.SELECTED DRAWING: Figure 1
Inventors:
UMEZAWA TOMOKAZU
Application Number:
JP2021152119A
Publication Date:
March 30, 2023
Filing Date:
September 17, 2021
Export Citation:
Assignee:
FUJIFILM CORP
International Classes:
C25D1/10
Attorney, Agent or Firm:
Patent Attorney Corporation Taiyo International Patent Office