Title:
MASTER DISK FOR OPTICAL DISK
Document Type and Number:
Japanese Patent JPS62270037
Kind Code:
A
Abstract:
PURPOSE: To improve the adhesiveness of a glass disk and resist and to improve the quality of a stamper formed therefrom by forming a monomolecular layer of a specific compd. as a silane coupling agent on one face of the glass disk and forming a positive type photoresist layer essentially consisting of a specific resin thereon.
CONSTITUTION: The monomolecular layer 2 consisting of a trichlorosilane is formed as the silane coupling agent on one face of the glass disk and the positive type photoresist layer 3 essentially consisting of a phenol novolack resin is formed thereon. The stamper manufactured of such master disk for the optical disk has the high quality and improved yield.
Inventors:
NAKAO KENICHIRO
NAGATE HIROSHI
FUJITA MASUMI
USUI HIROAKI
NAGATE HIROSHI
FUJITA MASUMI
USUI HIROAKI
Application Number:
JP11280486A
Publication Date:
November 24, 1987
Filing Date:
May 19, 1986
Export Citation:
Assignee:
HITACHI MAXELL
International Classes:
G11B7/24; G03C1/76; G03F7/00; G03F7/11; G11B7/26; (IPC1-7): G03C1/76; G03F7/00; G11B7/24
Attorney, Agent or Firm:
Kenjiro Take
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