Title:
MATERIAL FOR FORMING BARRIER FILM AND METHOD FOR FORMING PATTERN USING THE SAME
Document Type and Number:
Japanese Patent JP3954066
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a fine pattern having a preferable profile by preventing the influence of an immersion liquid to be used for immersion lithography on a resist film.
SOLUTION: A resist film 102 comprising a chemically amplified resist is formed on a substrate 101. Subsequently, a barrier film 103 is formed on the resist film 102, the barrier film preventing the elution of the component in the resist film into the immersion liquid or preventing the permeation of the immersion liquid into the resist film 102. Thereafter, with the immersion liquid 104 provided on the barrier film 103, the resist film 102 is selectively irradiated with exposure light 105 for pattern exposure through the barrier film 103. After the barrier film 103 is removed, the resist film 102 subjected to pattern exposure is developed to form a resist pattern 102a from the resist film 102.
Inventors:
Masataka Endo
Masako Sasako
Masako Sasako
Application Number:
JP2004361058A
Publication Date:
August 08, 2007
Filing Date:
December 14, 2004
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G03F7/11; G03C5/00; G03F7/00; G03F7/09; G03F7/20; H01L21/00; H01L21/027; H01L21/84; (IPC1-7): G03F7/11; H01L21/027
Domestic Patent References:
JP9090615A | ||||
JP2005099648A | ||||
JP2006133716A |
Foreign References:
WO2004074937A1 |
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Hiroshi Koyama
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
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