MATERIAL OF LOW GAS EMISSION AND LOW SECONDARY ELECTRON EMISSION - NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Title:

MATERIAL OF LOW GAS EMISSION AND LOW SECONDARY ELECTRON EMISSION

Document Type and Number:

Japanese Patent JP3530941

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a material of low gas emission and low secondary electron emission to be favorably used as a material for any apparatus capable of enhancing the sensitivity and accuracy of an electronic spectroscope to work in a super-high vacuum environment and also as a super-high vacuum or ultra-high vacuum structural material.
SOLUTION: A multi-layer graphite thin-film subjected to an orientation is precipitated on the surface of copper-nickel alloy in which carbon is included in the form of solid solution.

Inventors:

Fujita, Daisuke
Onishi, Keiko
Oki, Taizo

Application Number:

JP2002073192A

Publication Date:

May 24, 2004

Filing Date:

March 15, 2002

Export Citation:

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Assignee:

NATIONAL INSTITUTE FOR MATERIALS SCIENCE

International Classes:

H01J1/35; (IPC1-7): H01J1/35

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