Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MATERIAL FOR PHOTODECOLORIZABLE LAYER AND METHOD FOR FORMING PATTERN BY USING SAME
Document Type and Number:
Japanese Patent JPH01231040
Kind Code:
A
Abstract:

PURPOSE: To improve storage stability of a coating solution and to facilitate operation by forming the photodecolorizable layer comprising a styryl type dye having a triazine structure soluble in an organic solvent low in polarity as a photodecolorizable dye and a rosin as a binder.

CONSTITUTION: The photodecolorizable layer is formed by using as the binder resin one of the rosins, and as the photodecolorizable dye the styryl type dye having a triazine structure soluble in an organic solvent low in polarity represented by formula I in which each of R1WR5 is hydrogen, halogen, hydroxy, carboxylic ester, or the like. The patterns is formed by coating a substrate 21, such as a film-coated silicon base plate, with a resist 22, spin coating the resist 22 directly with the photodecolorizable layer 23, exposing the layer 23 through a photomask 24 to ultraviolet rays, and finally developing the layer 23 and the layer 22 at the same time by using an alkaline solution, thus permitting the obtained photodecolorizable layer to be suitable in optical characteristics and easy in coating operation, and the material for the photodecolorizable layer capable of executing direct development and the method for forming the pattern to be ensured.


Inventors:
TO YOICHI
YAMASHITA YOSHIO
KAWAZU TAKAHARU
JINBO HIDEYUKI
ASANO TAKATERU
KOBAYASHI KENJI
Application Number:
JP5627288A
Publication Date:
September 14, 1989
Filing Date:
March 11, 1988
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
OKI ELECTRIC IND CO LTD
FUJI YAKUHIN KOGYO KK
International Classes:
G03F7/26; G03C1/73; G03F7/095; G03F7/105; H01L21/027; (IPC1-7): G03C1/00; G03C1/72; G03C5/00; H01L21/30
Attorney, Agent or Firm:
Toshiaki Suzuki (1 person outside)