To realize a material transfer device in the vacuum equipment in which the material can be positioned without installing an alignment chamber and the transfer time of the material can be shortened.

The base 54 of the reserve exhaust chamber 41 is lowered downward by a vertical drive mechanism 63. In this state, a picture drawing material 46 is introduced into the reserve exhaust chamber 41 by an outside transfer robot 45, and mounted on the pins 55. Then, the reference rollers 57, 58, 59 are set in the reference position by a reference roller drive mechanism 56, and the pushing rollers 61, 62 are pressed on the two sides of the material by an alignment pressing mechanism 60, thereby positioning the material 46 precisely in XY direction. While the rollers 61, 62 are pressed and the alignment of the material are being carried out, a vent gas such as nitrogen gas is blown on the surface of the material 46 from a vent gas supply port 66.

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