Title:
MATRIX FOR ELECTROFORMING AND METAL MASK
Document Type and Number:
Japanese Patent JP2022141416
Kind Code:
A
Abstract:
To provide a matrix for electroforming in which a difference in current density between a region corresponding to a pattern forming region and a region corresponding to a solid part is eliminated to prevent variations in thickness dimensions of plating layers formed in both the regions and variations in the chemical composition.SOLUTION: On an upper surface of a base 10, a resist forming region 12 having a resist body 11 formed so as to correspond to a pattern forming region 4, and a flat region 13 without the resist body 11 formed so as to correspond to a solid region 5 and surround the resist forming region 12 are formed. A control structure 20 for reducing a current density of the resist forming region 12 in an electroforming process is provided at a position corresponding to the resist forming region 12 of the base 10.SELECTED DRAWING: Figure 1
Inventors:
NAGANUMA TOMOYA
UEHARA MOTOYUKI
UEHARA MOTOYUKI
Application Number:
JP2021041702A
Publication Date:
September 29, 2022
Filing Date:
March 15, 2021
Export Citation:
Assignee:
MAXELL LTD
International Classes:
C25D1/10; C25D1/00
Attorney, Agent or Firm:
Satoshi Morimoto