Title:
MEASUREMENT DEVICE, METHOD FOR MEASUREMENT, AND MEASUREMENT PROGRAM
Document Type and Number:
Japanese Patent JP2023149216
Kind Code:
A
Abstract:
To provide a measurement device, a method for measurement, and a measurement program that can secure a measurement accuracy of a thick measurement target.SOLUTION: A measurement device 10 includes: a measurement unit 20 having a radiation source 22 for emitting radiation to a measurement target 80 and a detector 24 for detecting radiation having passed through the measurement target 80 and outputting a detection signal; and a control unit 70 for calculating the thickness of the measurement target 80 on the basis of a sampling signal obtained by sampling the detection signal output from the detector 24 in the set upper limit of the range of sampling. The control unit 70 sets the upper limit of the sampling range on the basis of the thickness of the measurement target 80.SELECTED DRAWING: Figure 6
Inventors:
AZUMA KOHEI
NISHIDA KAZUFUMI
NISHIDA KAZUFUMI
Application Number:
JP2022057657A
Publication Date:
October 13, 2023
Filing Date:
March 30, 2022
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01B15/02
Attorney, Agent or Firm:
Kenji Sugimura
Mitsutsugu Sugimura
Yuro Yoshizawa
Kazushige Utsumi
Mitsutsugu Sugimura
Yuro Yoshizawa
Kazushige Utsumi
Previous Patent: JPWO2023149215
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