Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2010216937
Kind Code:
A
Abstract:

To precisely measure deflection characteristics of a mirror system capable of changing the tilting of a mirror surface, in a short time.

The measurement device includes a measurement light source 14 for irradiating the mirror surface with a measurement light; a concave surface projection section 20-1 including the projection surface 20a-1 of a concave surface shape, reflecting the light obtained by reflecting the measurement light emitted from the measurement light source 14 by the mirror surface; a light-receiving section 191 receiving the reflected light in the projection surface of the concave surface projection section 20-1; and a measurement section 104 measuring the characteristics of a mirror system, on the basis of the light received by the light receiving section 191.


Inventors:
Fujiwara, Katsumi
Application Number:
JP2009000062932
Publication Date:
September 30, 2010
Filing Date:
March 16, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUJITSU LTD
International Classes:
G01M11/00; G01N21/55