Title:
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2023012913
Kind Code:
A
Abstract:
To provide a measurement device and a measurement method with which it is possible to model the three-dimensional shape of a deep hole having a complex cross sectional shape with good accuracy while reducing the number of parameters.SOLUTION: The measurement device comprises an X-ray irradiation unit 21, an X-ray detection unit 23 for detecting a scattered X-ray generated from a specimen 7, and an analysis unit 24 for analyzing the diffraction image obtained by photoelectrically converting the scattered X-ray and estimating the three-dimensional shape of the specimen 7. The analysis unit 24 extracts a feature quantity from known shape information and determines a plurality of shape parameters that express a three-dimensional shape, and calculates the theoretical scattering intensity of the scattered X-ray when the values of the shape parameters are changed. The analysis unit 24 also creates a regression model of a relationship between the difference between measured and theoretical scattering intensities and the shape parameters. Furthermore, the analysis unit 24 estimates, while repeatedly changing shape parameter candidate values, the values of shape parameters with which the difference between the measured and theoretical scattering intensities is minimum.SELECTED DRAWING: Figure 5
Inventors:
HASHIMOTO TAKAKI
TANIZAKI HIROYUKI
TANIZAKI HIROYUKI
Application Number:
JP2021116674A
Publication Date:
January 26, 2023
Filing Date:
July 14, 2021
Export Citation:
Assignee:
KIOXIA CORP
International Classes:
G01B15/04
Attorney, Agent or Firm:
Patent Attorney Corporation Itosin International Patent Office