MEASUREMENT METHOD OF ELECTRIC CONDUCTIVITY OF VAPOR FOR CLEANING

Title:

MEASUREMENT METHOD OF ELECTRIC CONDUCTIVITY OF VAPOR FOR CLEANING

Document Type and Number:

Japanese Patent JP2007203126

Kind Code:

A

Abstract:

To provide a measurement method of an electric conductivity of vapor for cleaning capable of accurately and easily measuring an electric conductivity of vapor for cleaning delivered from a delivery distal end of a vapor cleaning apparatus.

The measurement method of the electric conductivity of the vapor for cleaning is a measurement method of the electric conductivity of the vapor for cleaning delivered from the delivery distal end of the cleaning apparatus for vapor-cleaning an object to be cleaned, and includes a step (ST301) for mounting a storage unit for storing the vapor for cleaning to the delivery distal end of the cleaning apparatus, a step (ST303) for storing the vapor for cleaning delivered from the delivery distal end of the cleaning apparatus in the storage unit, a step (ST304) for cooling the vapor for cleaning stored in the storage unit to liquefy it, and a step (ST306) for measuring the electric conductivity of a condensate of the vapor for cleaning.

Inventors:

KURIMASA KENICHI

Application Number:

JP2006021361A

Publication Date:

August 16, 2007

Filing Date:

January 30, 2006

Export Citation:

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Assignee:

OPTREX KK

International Classes:

B08B3/02

Attorney, Agent or Firm:

Ken Ieiri

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