Title:
極紫外光源のための計測法
Document Type and Number:
Japanese Patent JP5468143
Kind Code:
B2
Abstract:
An extreme ultraviolet light system includes a drive laser system that produces an amplified light beam; a target material delivery system configured to produce a target material at a target location; a beam delivery system configured to receive the amplified light beam emitted from the drive laser system and to direct the amplified light beam toward the target location; and a metrology system. The beam delivery system includes converging lens configured and arranged to focus the amplified light beam at the target location. The metrology system includes a light collection system configured to collect a portion of the amplified light beam reflected from the converging lens and a portion of a guide laser beam reflected from the converging lens. The light collection system includes a dichroic optical device configured to optically separate the portions.
Inventors:
Senecherimian Vahan
Kim Nam-Hyun
Bergstedt Robert N
Formen Coff Igo Vie
Partro William N
Kim Nam-Hyun
Bergstedt Robert N
Formen Coff Igo Vie
Partro William N
Application Number:
JP2012544608A
Publication Date:
April 09, 2014
Filing Date:
December 07, 2010
Export Citation:
Assignee:
Cymer Incorporated
International Classes:
H05G2/00
Domestic Patent References:
| JP2007109451A | ||||
| JP200897883A | ||||
| JP200987807A | ||||
| JP2011508965A |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi