To provide a measurement microscope apparatus with which a slope of a subject or a width a flat part can be measured in a short time.

Along a light path from a light source 1 to a specimen 30, the light source 1, a condenser lens 2, a first aperture 3, a second aperture 4, a condenser lens 5 and an objective lens 31 are provided. A half mirror 7 for deflecting emitted light from the light source 1 toward the specimen 30 is placed above the objective lens 31. A half mirror 6 for separating reflected light from the specimen 30 from light directing toward the specimen 30 is placed between the half mirror 7 and the condenser lens 5. A condenser lens 8 and a light position detector 9 are provided along light path of reflected light by the half mirror 6. The second aperture 4 is placed at a position conjugate to a face of the specimen 30, which the first aperture 3 and the light position detector 9 are placed together at a position conjugate to a focal position B behind the objective lens 31.