Title:
MEASUREMENT RESULT REPORT DEVICE, MEASUREMENT SYSTEM AND MEASUREMENT RESULT REPORT METHOD
Document Type and Number:
Japanese Patent JP2017187298
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To easily grasp what level of defect exists in a conductor path at which position of a substrate being inspected.SOLUTION: When visually reporting a measurement result in such a manner that the quality of each conductor path is specifiable, on the basis of reference value data composed of recorded reference values per conductor path in a substrate being inspected where a plurality of conductor paths are provided and measured value data composed of recorded measured values per conductor path that are measured by a measurement process intended for the substrate being inspected, the present invention computes values for specification by which the quality of each conductor path is specifiable, on the basis of the reference values and measured values, as well as generates image G4 data for report using the substrate image data of a substrate image G1a being inspected where a plurality of conductor path images Gl indicating each conductor path in correspondence to the position of each conductor path in the substrate being inspected by changing one of the hue, brightness and saturation of each conductor path image Gl in the substrate image G1a being inspected in correspondence to the value for specification, and reports a measurement result about each conductor path by the image G4 data for report.SELECTED DRAWING: Figure 6
Inventors:
KUBOTA YU
Application Number:
JP2016074081A
Publication Date:
October 12, 2017
Filing Date:
April 01, 2016
Export Citation:
Assignee:
HIOKI ELECTRIC WORKS
International Classes:
G01D7/08; G01R31/02; H05K3/00
Domestic Patent References:
| JP2007088109A | 2007-04-05 | |||
| JP2010177293A | 2010-08-12 | |||
| JP2002357629A | 2002-12-13 | |||
| JP2000183493A | 2000-06-30 | |||
| JP2007123503A | 2007-05-17 |
Attorney, Agent or Firm:
Shinji Sakai