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Patent Searching and Data


Title:
MEASUREMENT RESULT VERIFICATION SYSTEM
Document Type and Number:
Japanese Patent JP2014130140
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a measurement result verification system capable of verifying a measurement result measured on an inline.SOLUTION: The measurement result verification system includes: a first measuring device for measuring an object to be inspected in each unit area and transmitting measurement result information on each unit area; a marking device for marking a code pattern having index information in each unit area of the object to be inspected; a reader for acquiring the index information on a corresponding unit area from the code pattern of a predetermined unit area of the object to be inspected; a second measuring device for re-measuring the unit area from which the index information is acquired and transmitting the remeasurement result information on the unit area; and a verification device for verifying a measurement result of the first measuring device by respectively receiving the measurement result information on the first measuring device and the remeasurement result information on the second measuring device and comparing the measurement result information on the first measuring device, which corresponds to the index information acquired by the reader, with the remeasurement result information on the second measuring device.

Inventors:
JONGWOO KIM
YUN MI CHUNG
PARK JAE-HYUN
Application Number:
JP2013258377A
Publication Date:
July 10, 2014
Filing Date:
December 13, 2013
Export Citation:
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Assignee:
DONGWOO FINE CHEM CO LTD
International Classes:
G01B11/04; G01B11/26; G01N21/956
Attorney, Agent or Firm:
Patent Business Corporation Imy International Patent Office