Title:
MEASUREMENT SYSTEM, AND MEASUREMENT METHOD
Document Type and Number:
Japanese Patent JP2023151121
Kind Code:
A
Abstract:
To provide a technique capable of reducing the burden of setting measurement conditions for each circuit pattern when performing the same measurement procedure on multiple circuit patterns formed on a semiconductor member.SOLUTION: A disclosed measurement system is configured to set measurement points that are set in a reference circuit pattern for another circuit pattern having an identical circuit pattern, and when the circuit pattern has the same circuit pattern as the reference circuit pattern being flipped vertically or horizontally or rotated, to set after applying the inversion or rotation to the measurement point.SELECTED DRAWING: Figure 5
Inventors:
SUGIYAMA AKIYUKI
Application Number:
JP2022060565A
Publication Date:
October 16, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01L21/66; G01B15/00; H01J37/28; H01L21/82
Attorney, Agent or Firm:
Patent Attorney Corporation Hiraki International Patent Office
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