Title:
Measurement of the thickness of a layer
Document Type and Number:
Japanese Patent JP5995840
Kind Code:
B2
Abstract:
A technique comprising: producing a plurality of devices according to a common production process; and determining the thickness of a layer of one of said plurality of devices using an indicator of a first electrical property dependent on the area of overlap between a first element of the device and a second element of the device partially underlying said first element via said layer, wherein the method further comprises: additionally using an indicator of a second electrical property dependent on the area of overlap between said first element of the device and a third element of the device also partially underlying said first element via said layer, wherein (a) the difference between (i) a measured indicator of said first electrical property, and (ii) a measured indicator of said second electrical property provides a more reliable indicator of the thickness of said layer than (b) an indicator of said first electrical property.
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Inventors:
Stephan Riedel
Application Number:
JP2013512940A
Publication Date:
September 21, 2016
Filing Date:
June 03, 2011
Export Citation:
Assignee:
Flex enable limited
International Classes:
G01B7/06
Domestic Patent References:
| JP2307002A | ||||
| JP61070403A | ||||
| JP61181195A | ||||
| JP1223303A | ||||
| JP3238303A | ||||
| JP4273002A |
Other References:
1次関数1,高校受験コース中学2年数学トップレベル「要点」見本,日本,株式会社Z会,2015年 1月28日,AM0200981A-01,URL,http://www.zkai.co.jp/jr/koritsu/pdf/vm2ty.pdf
Attorney, Agent or Firm:
Etsushi Kotani
Masataka Otani
Usami Aya
Masataka Otani
Usami Aya