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Title:
MEASURING APPARATUS FOR MEASURING CHARACTERISTICS OF OBJECT TO BE MEASURED AND MEASURING METHOD FOR THE SAME
Document Type and Number:
Japanese Patent JP2013011440
Kind Code:
A
Abstract:

To provide a measuring apparatus capable of adjusting frequency of an electromagnetic wave and/or a device configuration using a device having a periodic structure part such as a photonic crystal, and to enable measurement of an object to be measured with high sensitivity and good reproducibility.

A measuring apparatus of the invention comprises a periodic structure in which a flat plate-shaped first periodic structure part 11 and a flat plate-shaped second periodic structure part 12 are arranged in parallel across a gap part 2 in which an object to be measured is placed. The first periodic structure part 11 and the second periodic structure part 12 are formed by alternately laminating flat plate-shaped high refractive index layers 11a, 12a and flat plate-shaped low refractive index layers 11b, 12b respectively, thereby complex dielectric constants of the periodic structure parts vary periodically. The measuring apparatus retains the object to be measured in the gap part 2 between the periodic structure parts 11, 12, detects an electromagnetic wave which has passed through the periodic structure, and measures characteristics of the object to be measured on the basis of variation of frequency characteristics or phase characteristics of the electromagnetic wave dispersed by the periodic structure due to the presence of the object to be measured.


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Inventors:
TAKIGAWA KAZUHIRO
KONDO TAKASHI
KAMINAMI SEIJI
MATSUMOTO HARUO
Application Number:
JP2009240435A
Publication Date:
January 17, 2013
Filing Date:
October 19, 2009
Export Citation:
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Assignee:
MURATA MANUFACTURING CO
International Classes:
G01N21/01; G01N21/35; G01N21/3577; G01N21/3586
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki