Title:
MEASURING APPARATUS OF ION ELECTRIC CURRENT
Document Type and Number:
Japanese Patent JPS5352185
Kind Code:
A
Abstract:
PURPOSE: To remove the difficulty trouble by the interference of thermion at the time of measuring the value of ion electric current and also, to make the apparatus simple, by measuring the amount of X-rays, generated from the face of sample by the irradation of ion beam.
Inventors:
IIMURA MASASHI
Application Number:
JP12624376A
Publication Date:
May 12, 1978
Filing Date:
October 22, 1976
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01R29/00; G01N3/18; G01T1/29; (IPC1-7): G01N3/18; G01R29/00