PURPOSE: To obtain a wide range pressure gauge in high accuracy, by arranging adjacently both pressure introducing parts of low pressure and high pressure by separating with a partition wall and connecting a pressure detection part of the low pressure and high pressure to both introducing parts mutually in parallel through a pressure conducting means.
CONSTITUTION: When pressure receiving diaphragms 5, 6 are displaced by receiving pressure through a pressure introducing opening 11, a sealed liquid 8 in connecting pipes 13, 15 is moved and the measured pressure is transmitted to a detection diaphragm 3 of a high pressure detection cell 1 and a detection diaphragm 4 of a low pressure detection cell 2 by the movement of the liquid 8, and the diaphragms 3, 4 are displaced in proportion to the pressure. A pair of fixed electrodes 9 is provided to the cell 1, 2 facing the diaphragms 3, 4 and a movable electrodes are constituted by the diaphragms 3, 4 for the electrode 9. Consequently, a space between the diaphragms 3, 4 and the electrode 9 is varied in accordance with the dispalcement of the diaphragms 3, 4 and the pressure is taken out as the variation of electrostatic capacity with an electronic circuit 10.
JPS479442A |