Title:
MEASURING APPARATUS
Document Type and Number:
Japanese Patent JP2560604
Kind Code:
B2
Abstract:
PURPOSE: To provide an electromagnetic force automatic balancing type measuring apparatus for providing a system with high response and stability, and for facilitating a measure for coexisting a wide dynamic range and high resolution without using a high-rate A-D converter.
CONSTITUTION: A measuring apparatus is provided with an analog arithmetic unit 8 for applying proportional and differential arithmetics to a displacement detecting value by a displacement detector 3, a converting means 7 for converting the displace detecting value into a pulse signal having a frequency corresponding to its magnitude, a counter 11a for counting up and down the pulse signal from the converting means by corresponding to the polarity of the displacement detecting value, and a D-A converting means 12a for converting the counting result by the counter 11a into an analog signal. Each output from the D-A converting means 12a and the analog arithmetic unit 8 is added to feed back to a focus coil 5a. The output from the counter 11a is used for determining a measuring display value.
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Inventors:
YAMAGUCHI TOSHUKI
KAWAMOTO AKIRA
KAWAMOTO AKIRA
Application Number:
JP6797093A
Publication Date:
December 04, 1996
Filing Date:
March 26, 1993
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01G7/04; G01G23/37; G01L1/08; G01L11/00; (IPC1-7): G01G7/04; G01G23/37; G01L1/08
Domestic Patent References:
| JP3115932A |
Attorney, Agent or Firm:
Nishida Arata