Title:
LASER ANNEALING TREATMENT DEVICE
Document Type and Number:
Japanese Patent JP3136393
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To well execute preheating of a work while preventing the fall of a temp. in the part of the work right under the laser introducing window of the device having prescribed constitution by providing the periphery of the introducing window described above with specific means.
SOLUTION: This device includes a vacuum chamber 1 in which the work M is housed, a preheating means which is disposed in this vacuum chamber 1 and preheats the work, a laser generating means 6 which is disposed outside the vacuum chamber 1 and generates the laser beam and the laser introducing window 5 which is disposed on the wall surface 1a of the vacuum chamber 1 and introduces the laser beam R for irradiating the work M from the outside of the vacuum chamber 1 into the vacuum chamber. The peripheral part of the laser introducing window 5 in the vacuum chamber 1 of the device described above is provided with an IR reflecting means 10 for reflecting the IR rays radiated from the part of the work M right under the laser introducing window 5 and returning the IR rays to the part of the work M.
Inventors:
Kazuyuki Kawahara
Miki Sawai
Osamu Kato
Yuji Maruki
Miki Sawai
Osamu Kato
Yuji Maruki
Application Number:
JP19317795A
Publication Date:
February 19, 2001
Filing Date:
July 28, 1995
Export Citation:
Assignee:
Japan Steel Works, Ltd.
International Classes:
C30B35/00; H01L21/20; H01L21/268; (IPC1-7): C30B35/00; H01L21/20; H01L21/268
Domestic Patent References:
| JP940499A | ||||
| JP2263799A | ||||
| JP5226275A |
Attorney, Agent or Firm:
Shinshiro Arichika