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Patent Searching and Data


Title:
MEASURING DEVICE FOR DEGREE OF VACUUM
Document Type and Number:
Japanese Patent JPS5776432
Kind Code:
A
Abstract:

PURPOSE: To indicate the degree of vacuum in a wide range precisely only by one discharge by measuring the discharge current in a vacuum valve to be measured after amplifying the current with a logarithmic amplifier and them indicating the measured result on an indicator.

CONSTITUTION: A discharge current detecting part 1 detects the current produced when magnetron discharge occurs in a vacuum valve to be measured. The detected value is amplified by a logarithmic amplifier composed of a feedback element D with logarithmic characteristic and an amplifier A and measured by a measuring circuit 6 and then the degree of vacuum found by the measuring circuit 6 is indicated by an indicator according to the correlation between the current and the degree of vacuum which has been previously found. Thus, discharge having influence to the degree of vacuum is limited only once to indicate the degree of vacuum in a wide range precisely.


Inventors:
NIIDE TATSUAKI
Application Number:
JP15266380A
Publication Date:
May 13, 1982
Filing Date:
October 30, 1980
Export Citation:
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Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
G01L21/34; G01L21/30; (IPC1-7): G01L21/30