Title:
測定装置、露光装置及びデバイス製造方法
Document Type and Number:
Japanese Patent JP4512627
Kind Code:
B2
Abstract:
The present invention provides a measuring apparatus which measures a shape of a surface of a measurement target object, comprising a light projecting optical system configured to split light from a light source into measurement light and reference light so that the measurement light enters the surface of the measurement target object and the reference light enters a reference mirror, a light receiving optical system configured to guide the measurement light reflected by the surface of the measurement target object and the reference light reflected by the reference mirror to a photoelectric conversion device, and a processing unit configured to calculate the shape of the surface of the measurement target object based on an interference pattern which is detected by the photoelectric conversion device and formed by the measurement light and the reference light.
Inventors:
Ryo Sasaki
Application Number:
JP2007260358A
Publication Date:
July 28, 2010
Filing Date:
October 03, 2007
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/24; G01B9/02; G03F9/02; H01L21/027
Domestic Patent References:
| JP2000105101A | ||||
| JP2000097622A | ||||
| JP2000097664A | ||||
| JP51026032B1 | ||||
| JP3110405A | ||||
| JP4204003A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu