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Patent Searching and Data


Title:
MEASURING DEVICE FOR FLATNESS OF INSPECTED PLANE GLASS
Document Type and Number:
Japanese Patent JPS55140102
Kind Code:
A
Abstract:

PURPOSE: To permit the measurement of flatness under a brighter condition than conventional measuring devices only by decreasing the amount of light by half of a source of light when measuring the flatness of glass plate etc. by applying to a Fizeau's interferometer.

CONSTITUTION: The polarized laser light 1 is emitted and composed a parallel beam by a collimator lens 3 and projected on a polarized beam splitter 4. Half of the amount of the incident light is penetrated to P wave component side at the splitter 4. The remaining half of the amount of light is bent to S wave component side at a right angle and penetrated a quarter wave length plate 5 and an optical flat 6 to generate an interference light. The interference light is reflected and penetrated the optical flat 6 side and repenetrated the quarter wave length plate 5 to penetrate the polarized beam splitter 4. The beam is focused into an image at a focal surface of a collimator lens 8 and the interference light is observed by an ocular 9. The amount of light at the time of measurement is only reduced to half of a source of light because the quarter wave length plate is provided at the S wave side of the splitter.


Inventors:
FUNAZAKI KAZUJI
Application Number:
JP4799579A
Publication Date:
November 01, 1980
Filing Date:
April 20, 1979
Export Citation:
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Assignee:
SOKKISHA
International Classes:
G01B11/24; G01B11/30; G02B27/50; (IPC1-7): G01B11/24; G01B11/30; G02B27/50