Title:
測定装置および測定方法
Document Type and Number:
Japanese Patent JP2005504314
Kind Code:
A
Abstract:
In a measurement arrangement comprising an optical device, into which a diverging beam coming from a specimen is coupled for measurement, and further comprising a detector, which is arranged following said optical device and comprises a multiplicity of detector pixels arranged in one plane and evaluable independently of each other, wherein the optical device spectrally disperses the diverging beam in a first direction transversely of the propagation direction of the beam and directs it to the detector, the optical device also parallels the beam, before it impinges on the detector, in a second direction transversely of the propagation direction (C) such that rays of the beam impinging on the detector, which are adjacent to each other in the second direction, extend parallel to each other.
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Inventors:
Dobshall, Hans-Jurgen
Marshke, Gunter
Bischoff, Jerk
Marshke, Gunter
Bischoff, Jerk
Application Number:
JP2003532935A
Publication Date:
February 10, 2005
Filing Date:
September 18, 2002
Export Citation:
Assignee:
Carl Zeiss Microelectronic Systems Gezelshaft Mitt Beschlenktel Haftung
International Classes:
G01J3/36; G01J3/28; G01J4/00; G01N21/21; G01N21/27; G01N21/47; (IPC1-7): G01J3/36; G01N21/27
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda