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Title:
測定装置及び測定方法
Document Type and Number:
Japanese Patent JP5127159
Kind Code:
B2
Inventors:
Shiota Morality
Application Number:
JP2006140883A
Publication Date:
January 23, 2013
Filing Date:
May 19, 2006
Export Citation:
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Assignee:
Canon Inc
International Classes:
G01N21/35; G01N21/3586
Domestic Patent References:
JP2004279352A
Other References:
S.P.Mickan 他,“Double modulated differential THz-TDS for thin film dielectric characterization”,Microelectronics Journal,2002年,Vol.33,pp.1033-1042
Attorney, Agent or Firm:
Kazuo Kato



 
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