Title:
測定装置及び測定方法
Document Type and Number:
Japanese Patent JP6955058
Kind Code:
B2
Abstract:
To suitably perform measurement for a measurement target object.SOLUTION: A measurement device (1) comprises separate irradiation means (200) for separating laser light (Li) into a plurality of light beams (Ld1, Ld2) to irradiate mutually different portions (401, 402) of a measurement target object (400) with the plurality of light beams at mutually different incident angles and light reception means (500) for receiving scattering light (Ls1, Ls2) of the plurality of light beams scattering at the measurement target object. The measurement device enables suitable measurement while reducing damage on the measurement target object caused by irradiation of the laser light.SELECTED DRAWING: Figure 1
Inventors:
Ikuya Kikuchi
Atsuya Ito
Atsuya Ito
Application Number:
JP2020100435A
Publication Date:
October 27, 2021
Filing Date:
June 09, 2020
Export Citation:
Assignee:
Pioneer Corporation
International Classes:
G01P5/26; G01P3/36; G01S17/58
Domestic Patent References:
| JP10085195A |
Attorney, Agent or Firm:
Tatsuo Egami
Satoshi Nakamura
Satoshi Nakamura