Title:
計測装置および計測方法
Document Type and Number:
Japanese Patent JP7087283
Kind Code:
B2
Abstract:
To make a measurement range of an object in a case of using a line-like light reception unit much broader in comparison with a case where a measurement device does not have a relative revolving mechanism between the light reception unit and the object in the measurement device irradiating the object with illumination light from a light source via an optical system and measuring the object using reflection light from the object.SOLUTION: A measurement device includes: a light emission unit that emits illumination light to be irradiated toward an object; a first lens that changes a divergence degree of the illumination light; a diaphragm unit that stops down the illumination light exited from the first lens; a second lens that converges the illumination light passing through the diaphragm unit so as to irradiate the illumination light from a predetermined direction of the object; a light reception unit that has a plurality of light reception elements arranged in the predetermined direction, is arranged between the diaphragm unit and the second lens, and receives reflection light reflected upon the object irradiated with the illumination light; and a revolving unit that revolves a relative position with respect to the object of the light reception unit with an illumination direction of the illumination light as a revolving axis while maintaining an illumination position with respect to the object of the illumination light.SELECTED DRAWING: Figure 1
Inventors:
Jiro Matsuda
Hiroyuki Hotta
Hiroyuki Hotta
Application Number:
JP2017111766A
Publication Date:
June 21, 2022
Filing Date:
June 06, 2017
Export Citation:
Assignee:
Fuji Xerox Business Innovation Co., Ltd.
International Classes:
G01N21/88; G01B11/30
Domestic Patent References:
| JP2015072175A | ||||
| JP2009229234A | ||||
| JP2011215016A | ||||
| JP55044986A | ||||
| JP2008098451A |
Foreign References:
| US20120248347 |
Attorney, Agent or Firm:
Patent Service Corporation Taiyo International Patent Office