Title:
測定装置及び測定方法
Document Type and Number:
Japanese Patent JP7290828
Kind Code:
B2
Abstract:
To provide a device and a method that can measure an object at high sensitivity and high resolving power.SOLUTION: A device measuring an object 10 having a first plane 11 comprises: a transmission/reception unit that has a first antenna 241 and a second antenna 242; and a measurement unit. The first antenna 241 and the second antenna 242 in which respective aperture planes are directed at the first plane 11, and are arranged at a mutually prescribed antenna interval D so as to be located on the same plane F, are configured to transmit a micro wave in which a frequency regularly changes with respect to a time toward the first plane 11, and receive the micro wave reflected from the first plane 11 as a first reflection wave and a second reflection wave, respectively. The measurement unit is configured to obtain a phase difference between the first reflection wave and the second reflection wave, and obtain a tilt θ of the object 10 with respect to the same plane F on the basis of a rate of change to the frequency and the prescribed antenna interval D.SELECTED DRAWING: Figure 5
Inventors:
Takahiro Kinoshita
Atsushi Sugihashi
Atsushi Sugihashi
Application Number:
JP2019129080A
Publication Date:
June 14, 2023
Filing Date:
July 11, 2019
Export Citation:
Assignee:
Nippon Steel Corporation
International Classes:
G01S13/34; G01B15/02; G01S7/02
Domestic Patent References:
| JP2003307420A | ||||
| JP2006509212A | ||||
| JP49028238B1 | ||||
| JP2009282022A | ||||
| JP2019007743A | ||||
| JP56168574A | ||||
| JP2011520097A | ||||
| JP8036054A |
Foreign References:
| WO2018235167A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Dorait International Patent Office
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