To provide a measuring device of optical characteristics to exactly capture a change of an optical characteristics of a sample by irradiating laser beam and investigate a cause of the change.
In the measuring device of optical characteristics to apply irradiation light (21) to an object to be measured and to measure the change of the optical characteristics, a real-time measuring device (48) and a spectrophotometer (46) are provided. The real-time measuring device (48) measures a transmittance of the sample optical part 35 to the irradiation light (21) while applying the irradiation light (21) to the sample optical part (35). The spectrophotometer (46) measures wavelength dependency of the optical characteristics of the optical part (35) by applying wavelength variable reference light (39) to the optical part (35) after irradiation light (21) are applied. Both the measurement by the real-time measuring device (48) and the measurement by the spectrophotometer (46) are carried out in nearly the same circumstance which the sample optical part (35) are blocked from the outside air thoroughly.
SUMIYA AKIRA
YOSHIDA FUMIKA
KAWASA YOUICHI
WAKABAYASHI OSAMU
ITANI TOSHIRO
ISHIKAWA SEIICHI
SEMICONDUCTOR LEADING EDGE TEC