Title:
計測装置
Document Type and Number:
Japanese Patent JP5572067
Kind Code:
B2
Abstract:
A measurement apparatus which measures a distance between a reference surface and a test surface, comprises a light source unit including a plurality of light sources each corresponding to one of a plurality of wavelength scanning ranges and each continuously scans a wavelength of generated light in the corresponding wavelength scanning range, an interferometer unit which splits light emitted by each of the plurality of light sources into reference light and test light, and detects, as an interference signal, an interference fringe formed by the reference light and the test light, and a processor which determines a slope of a phase of the interference signal with respect to wave number of the light based on the interference signal detected by the interferometer unit for each of the plurality of wavelength scanning ranges, and determines the distance from the slope of the phase.
Inventors:
Tokimitsu 拓海
Books 福之
Books 福之
Application Number:
JP2010251278A
Publication Date:
August 13, 2014
Filing Date:
November 09, 2010
Export Citation:
Assignee:
Canon, Inc.
International Classes:
G01B9/02; G01B11/00; G01J9/02
Attorney, Agent or Firm:
Yasunari Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Hideji Kimura
Shimoyama 治
Yukimitsu Nagagawa
Shiro Takayanagi
Yasuhiro Otsuka
Hideji Kimura
Shimoyama 治
Yukimitsu Nagagawa