To reduce a zero-point temperature drift due to the contribution of the electrostatic coupling in wiring for detecting oscillating arm, on the base of an oscillator.
A measuring element for an oscillation type gyroscope includes a base 2A, having a first axis X and a second axis Y that extends along a predetermined surface, the oscillator for providing a detection oscillating arm for detecting rotating angle speeds about a drive oscillating arm and the second axis Y, an actuation side signal electrode 32 provided on the drive oscillating arm, a driving-side grounding electrode 33 provided on the drive oscillating arm, detection-side signal electrodes 30A-30D, respectively provided on the detection oscillating arm, detection-side grounding electrodes 31, respectively provided on the detection oscillating arm, detection-side signal wiring 40 forming on the base 2A corresponding to the detection-side signal electrodes, and detection-side grounding wiring 41 forming on the base 2A, corresponding to the detection-side grounding electrodes 31. A plurality of the detection-side signal wiring 40 is provided on the base 2A, and also the detection-side signal wiring 40 is separated mutually and electrically.
GOJI SHOSAKU
KIKUCHI TAKAYUKI
OSUGI YUKIHISA
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| JP4671284B2 | 2011-04-13 | |||
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| JP2011095270A | 2011-05-12 | |||
| JP2005017273A | 2005-01-20 | |||
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Juno Aoki