To reduce zero-point temperature drift with electrostatic coupling in signal wires for detection contributing thereto at a base part, as to an element for measuring a vibration gyroscope comprising the base part, a drive vibration arm, and a Y-axis detection vibration arm.
A vibrator is equipped with a base part 2A, a drive vibration arm, and a detection vibration arm for detecting rotational angular velocity around a prescribed axis. Detection-side signal wires 40 and 50 are formed on a surface and backside 2a and 2b, respectively, of the base part correspondingly to detection-side signal electrodes. Detection-side grounding wires 41 and 51 are formed on the surface and backside, respectively, of the base part correspondingly to detection-side grounding electrodes. A detection-side signal wire connection part 60 connects a detection-side signal electrode on the surface of the base part and a detection-side signal electrode on the backside of the base part. A detection-side grounding wire connection part 61 connects a detection-side grounding wire on the surface of the base part and a detection-side grounding wire on the backside of the base part. The width of the grounding wire connection part and that of the signal wire connection part change, respectively.
COPYRIGHT: (C)2007,JPO&INPIT
Goji Shosaku
Takayuki Kikuchi
Yukihisa Osugi
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Juno Aoki