Title:
測定装置、膜厚センサ、成膜装置および異常判定方法
Document Type and Number:
Japanese Patent JP7401402
Kind Code:
B2
Abstract:
To provide a measuring device capable of determining an abnormality location of a wiring cable, a film thickness sensor, a deposition device, and an abnormality determination method.SOLUTION: A measuring device according to one aspect is connected to a crystal oscillator installed in the device via a wiring cable, and measures, in time series, a mass of a deposit to the crystal oscillator on the basis of a change in an oscillatory frequency of the crystal oscillator. The measuring device comprises an oscillation circuit, a measurement circuit, a storage unit, and a controller. The measurement circuit measures a resonant frequency of the crystal oscillator. The storage unit stores abnormal value data, which is data on a frequency response from a detection system including the crystal oscillator and the wiring cable and collected in advance as an abnormal value of the detection system, in a frequency band other than a resonant frequency of the crystal oscillator. The controller determines the presence or absence of abnormality in the detection system on the basis of the abnormal value data.SELECTED DRAWING: Figure 3
Inventors:
Atsushi Ito
Yoshikuni Horishita
Motoko Ichihashi
My wife Michiru
Yoshikuni Horishita
Motoko Ichihashi
My wife Michiru
Application Number:
JP2020118253A
Publication Date:
December 19, 2023
Filing Date:
July 09, 2020
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G01N5/02; C23C14/52; C23C14/54; C23C16/52
Domestic Patent References:
| JP2018083958A | ||||
| JP6703217B1 | ||||
| JP2003149058A | ||||
| JP2006231084A | ||||
| JP10148653A |
Foreign References:
| WO2009038085A1 | ||||
| US20200173898 |
Attorney, Agent or Firm:
Patent Attorney Corporation Minami Aoyama International Patent Office
Junichi Ohmori
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino
Junichi Ohmori
Mitsuru Takahashi
Teppei Nakamura
Yukinobu Hibino