Title:
MEASURING EQUIPMENT FOR POSITIONAL ADJUSTMENT
Document Type and Number:
Japanese Patent JP2868387
Kind Code:
B2
Abstract:
PURPOSE: To provide an equipment for carrying out the measurement positively without causing defective measurement while contributing to facilitation, quickening and high accuracy in the relative positioning work of components or mechanisms constituting the equipment.
CONSTITUTION: The measuring equipment comprises a measuring section 5 equipped with a member 23 to be engaged with a reference object while copying, a section 7 to be measured equipped with a member 33 to be engaged with the object while copying and provided separately from the measuring section 5, and means 11-16... for detecting the displacement of the section 7 from the measuring section 5.
Inventors:
OOSAWA TADAYASU
Application Number:
JP10753693A
Publication Date:
March 10, 1999
Filing Date:
April 09, 1993
Export Citation:
Assignee:
KAIJOO KK
International Classes:
G01B11/00; B65G49/06; B65G49/07; H01L21/304; H01L21/677; H01L21/68; (IPC1-7): G01B11/00; B65G49/06; B65G49/07; H01L21/304; H01L21/68
Domestic Patent References:
| JP799229A |
Other References:
【文献】実用新案登録2564432(JP,Y2)
Attorney, Agent or Firm:
Shoji Hagiri