Title:
MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JP2004233091
Kind Code:
A
Abstract:
To provide a measuring instrument for measuring the position, the shape or the like of an object to be measured with the accuracy of measurement improved by an electrostatic capacity sensor.
The measuring instrument is set to the timing so that the drive current of a sensor probe 101 and the drive current of a sensor probe 102 do not flow simultaneously during the measurement, or the change in the current or the voltage given to the sensor probe 102 is set to be zero in a state in which the drive current flows in the sensor probe 101 and a measurement can be made.
Inventors:
KITAOKA ATSUSHI
Application Number:
JP2003019002A
Publication Date:
August 19, 2004
Filing Date:
January 28, 2003
Export Citation:
Assignee:
CANON KK
International Classes:
G01B7/00; (IPC1-7): G01B7/00
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura