MEASURING METHOD OF CHARGED PARTICLE BEAM AND CHARGED PARTICLE BEAM SCANNING DEVICE

Japanese Patent JP3911407

B2

PROBLEM TO BE SOLVED: To improve in simplification and certainty of electron-optical adjustment works of a charged particle beam scanning device through accurate and effective detection of shapes, sizes and density distribution of single charged- particle beams as well as display and recording of the result.
SOLUTION: A charged particle beam measurement control device 110 controls so as to scan areas including at least two points of which tangential directions are not parallel on a periphery of a measurement pattern fitted above a sample 104, and, a state measurement means 121, given input of plane image information obtained by an image processing device 109 when this scanning is made calculates differential values of brightness level of the inputted images in the two directions not parallel with each other, to find the shape, size and the density distribution of single charged-particle beams. The result is displayed on a display means 111 to make adjustment of a correction device 102 more efficient. Further, the recording means 123 records this result and measurement conditions such as irradiation energy when it is obtained as one file. The record is utilized for device management through record management, comparison between files or the like.

Kenjiro Yamamoto
Masatsugu Kametani
Yasuhiro Gunji
Hiroshi Miyai

JP2001357108A

May 09, 2007

November 22, 2001

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Hitachi High-Technologies Corporation

G01R1/06; H01J37/04; G21K5/04; H01J37/22; (IPC1-7): H01J37/04; G01R1/06; G21K5/04; H01J37/22

JP10223502A
JP11271458A
JP4370641A
JP7307136A

Yoshihiro Takasaki

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