To provide a method capable of accurately and properly measuring the response characteristics of a force sensor with respect to the force of a sine wave-shaped continuous wave.
A movable part 5, provided in the direct-acting state on a direct-acting bearing 1 (direct-acting static pressure air bearing), is connected to a pressure receiving part 2a of the force sensor 2 fixed and arranged opposite to the movable part 5 via an elastic body 7. Direct-acting movement of the movable part 5 is started, and the movable part is made to vibrate continuously. Then, a detection output from the force sensor 2 and an inertia force generated in the movable part 5 by the vibration movement of the movable part are measured. The inertia force of the movable part 5 is determined from acceleration, determined by measuring the moving speed of the movable part 5 by a light wave interferometer 13 and differentiating the moving speed.
TOKYO SOKKI KENKYUSHO CO LTD
Takeshi Sagi
Kenichi Homma