PURPOSE: To measure a relatively small degree of vacuum easily by detecting a current supplied to a turbo molecule pump.
CONSTITUTION: The turbo molecule pump 1 varies in rotating speed up to about 10-2 torr inlet pressure. The current supplied to the pump 1 also varies with the rotating speed. For the purpose, the value of the current supplied to the pump 1 is detected by an ammeter 5 to measure the pressure at the inlet of the pump. When a vacuum is produced in a bell jar 2, a roughening vauum rotary pump is used and then the pump 1 is used. The degree of vacuum in the bell jar 2 is measured from the current supplied to the pump 1 when low or through a high vacuum gauge 8 when high. Therefore, any special low vacuum gauge need not be used.
| JPS5867248 | [Title of the device] A control device of heat pump air-conditioning equipment |
| JP5978062 | Air compressor |
| JPS5710783 | COMPRESSOR |
KAWAGUCHI JIYUUICHI
OKAMURA JIROU
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