To provide a measuring method and a measuring device capable of measuring highly accurately the surface shape of a specimen.

In this device equipped with a means for splitting a light flux emitted from a light source, one split light flux is allowed to enter a specimen surface 6, and the other light flux is allowed to enter a reference surface 7, and reflected light from the specimen surface 6 and reflected light from the reference surface 7 are allowed to interfere with each other, and the surface shape of the specimen is measured based on an interference fringe acquired thereby. A means for allowing oblique incidence allows oblique incidence of the light flux into the specimen surface 6 and the reference surface 7 at a prescribed angle. A detection means detects the interference fringe acquired by interference between the reflected light from the specimen surface 6 and the reflected light from the reference surface 7. A means for calculating shape information calculates the shape information of the specimen based on information on the interference fringe detected by the detection means and the angle of oblique incidence.

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