MEASURING METHOD FOR ELECTROMAGNETIC RADIATION

Japanese Patent JP3403099

B2

PROBLEM TO BE SOLVED: To execute measurement of electromagnetic radiation and calculation of derives parameters and values easily and accurately by modulating electromagnetic radiation from a radiation source actively with characteristic parameters and correcting radiation from an object with radiation from the radiation source.
SOLUTION: Radiation from a semiconductor wafer 2 (object) and radiation from lamps (radiation source) 4, 5 reflected on the wafer 2 are measured by a wafer pyrometer (second detector) having a large incident angle and the light emitted from the lamp 5 is measured directly by a lamp pyrometer (first detector) 7 through an optical channel 8. Output signals from the wafer pyrometer and the lamp pyrometer 7 are introduced to an evaluation circuit and the modulation factors or depths of radiation are compared or associated to compensate or cancel the reflected light from the wafer 7 detected by the wafer pyrometer. According to the method, temperature, reflectivity, transmissivity and/or emissivity from the wafer 2 can be measured accurately.

WO/2022/186479	CHROMATICITY MEASUREMENT DEVICE FOR ADJUSTING POSITION BY USING REFERENCE LIGHT
JPS5923888	[Title of the device] Flame detector

Marx Hauf
Thomas Kunal
Heinrich Valk
Horst balthazar
Uwe Muller

JP34840798A

May 06, 2003

December 08, 1998

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Steak Ertepe Systems Gezel Shaft Mitt Beschlenktel Haftung

G01J1/44; G01J5/00; G01J5/10; H01L21/26; (IPC1-7): G01J1/44; G01J5/10

JP7333063A
JP396839A
JP4305130A
JP8184496A
JP853766A
JP59155741A
JP8233727A
JP4191642A
JP8285773A
JP62172228A
JP7167786A
JP2124536U
JP6338139U
JP6288361U
JP5559462U
JP2504676A

【文献】米国特許5180226(US,A)
【文献】米国特許5154512(US,A)

Toshio Yano (3 outside)

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