Title:
MEASURING METHOD FOR FINE GAP WIDTH
Document Type and Number:
Japanese Patent JP3161116
Kind Code:
B2
Abstract:
PURPOSE: To achieve a highly accurate measurement of a fine gap width below 0.2μm of a magnetic head or the like which is impossible to measure by the conventional optical method.
CONSTITUTION: A pointed probe 1 and a sample 5 are arranged. A feed back function is also provided to keep a pressure applied constant between the probe 1 and the sample 5. In addition, a stage 6 is provided to move positions of the probe 1 and the sample 5 relatively, a power source 3 to apply a bias voltage between the probe 1 and the sample 5, an amplifier 4 to detect current flowing between the probe 1 and the sample 5 and a computer 10 to perform a signal processing.
Inventors:
Keiji Kubo
Keiichi Yoshizumi
Keiichi Yoshizumi
Application Number:
JP313993A
Publication Date:
April 25, 2001
Filing Date:
January 12, 1993
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G01B7/00; G01B7/06; G01B7/14; G01B11/14; G01B11/02; G01B21/16; G01B21/30; G01Q60/32; G01Q60/36; G01Q60/40; G01Q70/14; G01Q80/00; G01Q90/00; (IPC1-7): G01B11/14; G01B7/00; G01B21/16
Domestic Patent References:
| JP4321955A | ||||
| JP348111A | ||||
| JP321803A |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)